Job Overview

We are seeking a highly motivated Equipment Maintenance Engineer (m/f/d) responsible for maintaining the reliability, availability, and optimal performance of semiconductor front-end processing equipment used in metallization and plasma-based processes. The role emphasizes the implementation of preventive and predictive maintenance strategies, advanced troubleshooting, root cause analysis, and continuous improvement initiatives to support high-volume semiconductor manufacturing.

The engineer will collaborate closely with Process Engineering, Production, Facilities, and equipment vendors to ensure stable tool operation, minimize downtime, improve yield, and maintain strict compliance with cleanroom protocols and contamination control standards.

Job Requirements

Equipment Reliability & Maintenance Engineering

• Develop and improve preventive/predictive maintenance programs for metallization and plasma tools (PVD, E-Beam, Ion Beam Etch, PECVD)
• Lead advanced troubleshooting and root cause investigations across vacuum, RF/DC plasma, electrical, mechanical, thermal, and robotic subsystems
• Analyze fault logs and system data to identify degradation trends and implement corrective actions
• Support rapid tool recovery to restore production capability
• Oversee critical maintenance including chamber rebuilds, target replacement, pump servicing (cryopumps, turbopumps, dry pumps), RF calibration, and robot alignment

Equipment Performance Optimization

• Collaborate with Process Engineering to improve process stability, chamber matching, and yield
• Lead initiatives to improve reliability metrics such as MTBF and MTBI through upgrades, retrofits, and preventive actions
• Conduct statistical analysis (SPC, trend analysis, JMP or similar) to identify chronic issues and implement corrective action plans
• Support new equipment installations, tool qualification, and process transfers

Vacuum & Plasma Systems & Contamination control

• Provide technical leadership for vacuum and plasma subsystems including pumps, MFC calibration, RF generators, matching networks, plasma sources, and ion beam systems
• Perform or supervise leak detection, vacuum diagnostics, and chamber health monitoring
• Oversee post-maintenance chamber cleaning, conditioning, and verification, coordinating with Process Engineering to confirm film quality and performance

Engineering Documentation, Collaboration & Safety

• Maintain maintenance procedures, troubleshooting guides, and engineering documentation
• Analyze downtime and maintenance records to identify reliability improvement opportunities
• Work with OEM vendors and field service engineers on troubleshooting, upgrades, and spare parts strategy
• Provide technical guidance to technicians and coordinate with production, facilities, process, and quality teams
• Ensure compliance with EHS policies including LOTO, high-voltage safety, chemical handling, vacuum safety, and cleanroom standards

What your background should look like

• Bachelor’s degree in Electrical engineering, Mechanical Engineering, Mechatronics, Materials Science, or a related engineering field; equivalent semiconductor industry experience may be considered
• 4-8 years of experience supporting semiconductor front-end process equipment, particularly in metallization (PVD, E-Beam Evaporation), plasma processing (PECVD, plasma etch), and ion beam systems
• Strong knowledge of vacuum systems (cryopumps, turbopumps, dry pumps, RGA analysis), RF/DC plasma systems, robotic wafer handling systems, and gas delivery systems with safety interlocks
• Experience using diagnostic equipment such as oscilloscopes, multimeters, leak detectors, vacuum gauges, and Residual Gas Analyzers (RGA)
• Ability to read and interpret electrical schematics, mechanical drawings, and system P&Ids
• Familiarity with reliability and problem-solving methodologies including SPC, FMEA, 5-Why, Ishikawa, and related engineering tools
• Strong analytical and troubleshooting capabilities with attention to detail
• Demonstrated ownership mindset and ability to collaborate with engineering, production, and maintenance teams
• Effective cross-functional communication and ability to work in fast-paced cleanroom manufacturing environments
• Fluency in English and German, both written and spoken, is mandatory

Competencies