Senior Process Development Engineer (m/w/d) - Lithography

Job Overview

We are looking for a highly motivated Process Development and Equipment Engineer to drive process integration, tool qualification, and continuous improvement of semiconductor manufacturing processes. The role focuses on developing robust process recipes, managing tool performance, and supporting technology transfers in a high-volume fab environment. You will interface with cross-functional teams (R&D, maintenance, quality, and production) and external equipment suppliers to achieve process stability, yield targets, and cost efficiency. 

Process Development & Optimization: 

• Develop, characterize, and stabilize photolithography processes (e.g. resist- coating, development & exposure) for new technology nodes. 

• Define and optimize process windows using DOE (Design of Experiments), SPC, and advanced data analysis. 

• Perform root cause analysis on yield excursions, defectivity, and process deviations. 

• Establish and maintain process control plans, including critical dimension (CD) and overlay control, film thickness, uniformity, and defect density
  
  

Equipment Engineering: 

• Lead equipment selection, specification, and installation for new tools and technology upgrades. 

• Drive tool qualification (IQ/OQ/PQ) and process-tool matching across fleet. 

• Monitor and improve equipment uptime, MTBF (mean time between failure), and throughput using TPM (Total Productive Maintenance) methods.  

• Interface with equipment vendors for troubleshooting, upgrades, and preventive maintenance optimizatio
  
  

Data Analysis & Continuous Improvement: 

• Analyse large datasets from inline metrology (e.g. CD-SEM, ellipsometry, AFM) and end-of-line electrical test to identify trends and prevent process drift. 

• Develop automated scripts or dashboards for tool and process monitoring. 

• Lead FMEA and risk assessments for new process introduction and equipment changes. 

• Drive cost reduction through cycle time improvements, consumable optimization, and scrap CoPQ (Cost of Poor Quality) reduction initiatives
  
  

Collaboration & Documentation: 

• Provide technical support for production teams on process and equipment issues. 

• Collaborate with global engineering teams for technology transfer and benchmarking. 

• Document process recipes, work instructions, specifications, and change controls in compliance with quality standards (e.g. ISO9000, IATF). 

What your background should look like:

• Master’s or Bachelor’s degree in Electrical Engineering, Mechanical Engineering, Materials Science, Physics, Chemical Engineering, or related field. 

• 5+ years of experience in semiconductor process or equipment engineering in a manufacturing fab. 

• Solid understanding of semiconductor single unit processes, tool hardware, vacuum systems, RF plasma, thermal processes, or chemical reactions. 

• Strong analytical and problem-solving skills; proficiency with data analysis tools and programming languages is a plus  (e.g. JMP, R, Python, MATLAB, etc). 

• Fluent in German and English, both written and spoken (minimum level C1) 

Competencies